Radial and axial profiles in a diffused Ar/SF6 electronegative plasma with bi-Maxwellian electrons

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

Original languageEnglish
Publication date2000
Publication statusPublished - 2000
Externally publishedYes
Event11th International Toki Conference - Toki, Japan
Duration: 5 Dec 20008 Dec 2000

Conference

Conference11th International Toki Conference
CountryJapan
CityToki
Period05/12/200008/12/2000

Cite this

Stamate, E., & Ohe, K. (2000). Radial and axial profiles in a diffused Ar/SF6 electronegative plasma with bi-Maxwellian electrons. Abstract from 11th International Toki Conference, Toki, Japan.