Quasistatic analysis of square diaphragms and capacitive microphones using finite element calculation

Jesper Bay, Ole Hansen, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings MME'97
Place of Publication	Southampton
Publication date	1997
Pages	242-236
Publication status	Published - 1997
Event	8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States Duration: 31 Aug 1997 → 2 Sept 1997 Conference number: 8 http://iopscience.iop.org/0960-1317/8/2

Workshop	8th Workshop on Micromachining, Micromechanics and Microsystems
Number	8
Location	Southampton University
Country/Territory	United States
City	Southampton
Period	31/08/1997 → 02/09/1997
Internet address	http://iopscience.iop.org/0960-1317/8/2

OpenUrl availability

@inproceedings{9023375e52c64d829df659f220e9c6a5,

title = "Quasistatic analysis of square diaphragms and capacitive microphones using finite element calculation",

author = "Jesper Bay and Ole Hansen and Siebe Bouwstra",

year = "1997",

language = "English",

pages = "242--236",

booktitle = "Proceedings MME'97",

note = "8th Workshop on Micromachining, Micromechanics and Microsystems, MME '97 ; Conference date: 31-08-1997 Through 02-09-1997",

url = "http://iopscience.iop.org/0960-1317/8/2",

}

TY - GEN

T1 - Quasistatic analysis of square diaphragms and capacitive microphones using finite element calculation

AU - Bay, Jesper

AU - Hansen, Ole

AU - Bouwstra, Siebe

N1 - Conference code: 8

PY - 1997

Y1 - 1997

M3 - Article in proceedings

SP - 242

EP - 236

BT - Proceedings MME'97

CY - Southampton

T2 - 8th Workshop on Micromachining, Micromechanics and Microsystems

Y2 - 31 August 1997 through 2 September 1997

ER -