Quasistatic analysis of square dia-phragms and capacitive microphones using finite element calculation

Jesper Bay, Ole Hansen, Siebe Bouwstra

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationMME '97
    Publication date1997
    Pages242-245
    Publication statusPublished - 1997
    Event8th Workshop on Micromachining, Micromechanics and Microsystems - Southampton University, Southampton, United States
    Duration: 31 Aug 19972 Sep 1997
    Conference number: 8
    http://iopscience.iop.org/0960-1317/8/2

    Workshop

    Workshop8th Workshop on Micromachining, Micromechanics and Microsystems
    Number8
    LocationSouthampton University
    CountryUnited States
    CitySouthampton
    Period31/08/199702/09/1997
    Internet address

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