Quasi-Random Gratings Enabled by Wrinkled Photoresist Surfaces on a Rigid Substrate

Micro- A nd nanoscale surface wrinkling has been widely studied in artificial systems, mostly in soft substrates like polydimethylsiloxane or polystyrene, where the wrinkling dynamics are triggered by thermal stresses or tensile prestrains. Here, we introduce a new wrinkling regime based on photoresist layers on top of a rigid substrate. By introducing a bending deformation, combined with fluorine-based plasma treatment, wrinkles with a characteristic wavelength less than 1 μm can be created. By adding micropatterns on photoresists with standard UV exposure, ordered wrinkles can also be realized. This technique is demonstrated to be applicable in several commercially available photoresists, and the wrinkled patterns can be employed conveniently to create high-aspect-ratio silicon gratings and large-area silicon dioxide membranes. This unique strategy broadens the spectrum of available materials to create wrinkled surfaces in a controllable manner and provides a platform for the easier fabrication of wrinkle-based devices.