„Quartz-to-Quartz Direct Bonding" in Proceedings of the
                Electrochemical Society PV 97-36

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Electrochemical Society PV 97-36
Publisher	The Electrochemical Society
Publication date	1997
Pages	187-191
Publication status	Published - 1997

OpenUrl availability

@inbook{0c7ef2151af9427d98bb18ab258d8fea,

title = "„Quartz-to-Quartz Direct Bonding{"} in Proceedings of the Electrochemical Society PV 97-36",

author = "P. Rangsten and O. Vallin and Karin Ljungberg and Y. B{\"a}cklund",

year = "1997",

language = "English",

pages = "187--191",

booktitle = "Proceedings of the Electrochemical Society PV 97-36",

publisher = "The Electrochemical Society",

}