Quantitative XPS analysis of thin iron-oxide films: effect of electron scattering

P.C.J. Graat, Marcel A. J. Somers

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    Over the last decade Tougaard et al. (see e.g. Ref. 1) provided a formalism to calculate the contribution of inelastically scattered electrons to an XPS or AES spectrum. In that formalism it was assumed that the signal electrons move along straight lines to the surface. Recently, Werner et al. provided a formalism that includes the effect of elastic scattering [2]. In the present work XPS Fe 2p and O 1s spectra of oxidised Fe and e-Fe2N1-x surfaces were analysed applying Tougaard’s and Werner’s formalism. The influence of incorporating the contribution of elastic scattering of signal electrons to the results is discussed.
    Original languageEnglish
    Title of host publicationECASIA 97
    Place of PublicationChichester
    Publication date1997
    Publication statusPublished - 1997
    Event7th European Conference on Applications of Surface and Interface Analysis - Congress Centre, Goteborg, Sweden
    Duration: 16 Jun 199720 Jun 1997
    Conference number: 7


    Conference7th European Conference on Applications of Surface and Interface Analysis
    LocationCongress Centre

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