Quantitative XPS analysis of thin iron-oxide films: effect of electron scattering

P.C.J. Graat; Marcel A. J. Somers

Quantitative XPS analysis of thin iron-oxide films: effect of electron scattering

Delft University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Over the last decade Tougaard et al. (see e.g. Ref. 1) provided a formalism to calculate the contribution of inelastically scattered electrons to an XPS or AES spectrum. In that formalism it was assumed that the signal electrons move along straight lines to the surface. Recently, Werner et al. provided a formalism that includes the effect of elastic scattering [2]. In the present work XPS Fe 2p and O 1s spectra of oxidised Fe and e-Fe2N1-x surfaces were analysed applying Tougaard’s and Werner’s formalism. The influence of incorporating the contribution of elastic scattering of signal electrons to the results is discussed.

Original language	English
Title of host publication	ECASIA 97
Place of Publication	Chichester
Publisher	Wiley
Publication date	1997
Pages	805-808
Publication status	Published - 1997
Event	7th European Conference on Applications of Surface and Interface Analysis - Congress Centre, Goteborg, Sweden Duration: 16 Jun 1997 → 20 Jun 1997 Conference number: 7

Conference

Conference	7th European Conference on Applications of Surface and Interface Analysis
Number	7
Location	Congress Centre
Country/Territory	Sweden
City	Goteborg
Period	16/06/1997 → 20/06/1997

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title = "Quantitative XPS analysis of thin iron-oxide films: effect of electron scattering",

abstract = "Over the last decade Tougaard et al. (see e.g. Ref. 1) provided a formalism to calculate the contribution of inelastically scattered electrons to an XPS or AES spectrum. In that formalism it was assumed that the signal electrons move along straight lines to the surface. Recently, Werner et al. provided a formalism that includes the effect of elastic scattering [2]. In the present work XPS Fe 2p and O 1s spectra of oxidised Fe and e-Fe2N1-x surfaces were analysed applying Tougaard{\textquoteright}s and Werner{\textquoteright}s formalism. The influence of incorporating the contribution of elastic scattering of signal electrons to the results is discussed.",

author = "P.C.J. Graat and Somers, {Marcel A. J.}",

year = "1997",

language = "English",

pages = "805--808",

booktitle = "ECASIA 97",

publisher = "Wiley",

note = "7th European Conference on Applications of Surface and Interface Analysis, ECASIA 97 ; Conference date: 16-06-1997 Through 20-06-1997",

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TY - GEN

T1 - Quantitative XPS analysis of thin iron-oxide films

T2 - 7th European Conference on Applications of Surface and Interface Analysis

AU - Graat, P.C.J.

AU - Somers, Marcel A. J.

N1 - Conference code: 7

PY - 1997

Y1 - 1997

N2 - Over the last decade Tougaard et al. (see e.g. Ref. 1) provided a formalism to calculate the contribution of inelastically scattered electrons to an XPS or AES spectrum. In that formalism it was assumed that the signal electrons move along straight lines to the surface. Recently, Werner et al. provided a formalism that includes the effect of elastic scattering [2]. In the present work XPS Fe 2p and O 1s spectra of oxidised Fe and e-Fe2N1-x surfaces were analysed applying Tougaard’s and Werner’s formalism. The influence of incorporating the contribution of elastic scattering of signal electrons to the results is discussed.

AB - Over the last decade Tougaard et al. (see e.g. Ref. 1) provided a formalism to calculate the contribution of inelastically scattered electrons to an XPS or AES spectrum. In that formalism it was assumed that the signal electrons move along straight lines to the surface. Recently, Werner et al. provided a formalism that includes the effect of elastic scattering [2]. In the present work XPS Fe 2p and O 1s spectra of oxidised Fe and e-Fe2N1-x surfaces were analysed applying Tougaard’s and Werner’s formalism. The influence of incorporating the contribution of elastic scattering of signal electrons to the results is discussed.

M3 - Article in proceedings

SP - 805

EP - 808

BT - ECASIA 97

PB - Wiley

CY - Chichester

Y2 - 16 June 1997 through 20 June 1997

ER -