Abstract
The influence of fabrication-induced imperfections and material absorption on the quality (Q) factor of a microcavity pillar is studied numerically. The dependence on sidewall inclination, selective underetch, and intrinsic loss is quantified. The authors show that imperfections can lead to an improvement in Q and that a sidewall inclination angle of less than 1° causes a dramatic change in the Q factor. The variations in Q can be attributed to a delicate balance between effective index contrasts, mode overlap, and higher-order mode contributions.
| Original language | English |
|---|---|
| Article number | 011116 |
| Journal | Applied Physics Letters |
| Volume | 91 |
| Issue number | 1 |
| ISSN | 0003-6951 |
| DOIs | |
| Publication status | Published - 2007 |
Bibliographical note
Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.Keywords
- MICROCAVITIES
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