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Quality factors of nonideal micro pillars

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    Abstract

    The influence of fabrication-induced imperfections and material absorption on the quality (Q) factor of a microcavity pillar is studied numerically. The dependence on sidewall inclination, selective underetch, and intrinsic loss is quantified. The authors show that imperfections can lead to an improvement in Q and that a sidewall inclination angle of less than 1° causes a dramatic change in the Q factor. The variations in Q can be attributed to a delicate balance between effective index contrasts, mode overlap, and higher-order mode contributions.
    Original languageEnglish
    Article number011116
    JournalApplied Physics Letters
    Volume91
    Issue number1
    ISSN0003-6951
    DOIs
    Publication statusPublished - 2007

    Bibliographical note

    Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

    Keywords

    • MICROCAVITIES

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