Quality factors of nonideal micro pillars

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The influence of fabrication-induced imperfections and material absorption on the quality (Q) factor of a microcavity pillar is studied numerically. The dependence on sidewall inclination, selective underetch, and intrinsic loss is quantified. The authors show that imperfections can lead to an improvement in Q and that a sidewall inclination angle of less than 1° causes a dramatic change in the Q factor. The variations in Q can be attributed to a delicate balance between effective index contrasts, mode overlap, and higher-order mode contributions.
Original languageEnglish
JournalApplied Physics Letters
Volume91
Issue number1
Pages (from-to)011116
ISSN0003-6951
DOIs
Publication statusPublished - 2007

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Copyright (2007) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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  • MICROCAVITIES

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