Quality factor improvement of silicon nitride micro string resonators

Silvan Schmid; Bjarke Malm; Anja Boisen

doi:10.1109/MEMSYS.2011.5734466

Quality factor improvement of silicon nitride micro string resonators

Silvan Schmid, Bjarke Malm, Anja Boisen

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.

Original language	English
Journal	International Conference on Micro Electro Mechanical Systems
Pages (from-to)	481 - 484
ISSN	1084-6999
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734466
Publication status	Published - 2011
Event	24th International Conference on Micro Electro Mechanical Systems - Hilton Cancun Golf & Spa Resort, Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24 http://www.ieee-mems2011.org/

Conference

Conference	24th International Conference on Micro Electro Mechanical Systems
Number	24
Location	Hilton Cancun Golf & Spa Resort
Country/Territory	Mexico
City	Cancun
Period	23/01/2011 → 27/01/2011
Internet address	http://www.ieee-mems2011.org/

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title = "Quality factor improvement of silicon nitride micro string resonators",

abstract = "Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.",

author = "Silvan Schmid and Bjarke Malm and Anja Boisen",

year = "2011",

doi = "10.1109/MEMSYS.2011.5734466",

language = "English",

pages = "481 -- 484",

journal = "International Conference on Micro Electro Mechanical Systems",

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AU - Malm, Bjarke

AU - Boisen, Anja

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N2 - Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.

AB - Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.

U2 - 10.1109/MEMSYS.2011.5734466

DO - 10.1109/MEMSYS.2011.5734466

M3 - Conference article

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JF - International Conference on Micro Electro Mechanical Systems

T2 - 24th International Conference on Micro Electro Mechanical Systems

Y2 - 23 January 2011 through 27 January 2011

ER -

Quality factor improvement of silicon nitride micro string resonators

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