Quality factor improvement of silicon nitride micro string resonators

Silvan Schmid, Bjarke Malm, Anja Boisen

    Research output: Contribution to journalConference articleResearchpeer-review

    Abstract

    Resonant micro and nano strings are of interest for sensor applications due to their extraordinary high quality factors, low mass and tunable resonant frequency. It has been found that the quality factor of strings is usually limited by clamping loss. In this work, clamping loss has been addressed by varying the clamping design and string geometry. We present silicon nitride micro strings with quality factors (Q) of up to 4 million in high vacuum achieved by minimizing clamping loss. For applications such as for chemical sensing, strings need to vibrate at atmospheric pressure. Maximal quality factor values in air were measured for the shortest strings with the highest resonant frequency having an optimal width to height ratio.
    Original languageEnglish
    JournalInternational Conference on Micro Electro Mechanical Systems
    Pages (from-to)481 - 484
    ISSN1084-6999
    DOIs
    Publication statusPublished - 2011
    Event24th International Conference on Micro Electro Mechanical Systems - Hilton Cancun Golf & Spa Resort, Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24
    http://www.ieee-mems2011.org/

    Conference

    Conference24th International Conference on Micro Electro Mechanical Systems
    Number24
    LocationHilton Cancun Golf & Spa Resort
    CountryMexico
    CityCancun
    Period23/01/201127/01/2011
    Internet address

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