Pyrolytic carbon for MEMS string resonantors

Quang Long Nguyen, Peter Emil Larsen, Anja Boisen, Stephan Sylvest Keller

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Publication status	Published - 2018
Event	International Conference on Expanding Frontiers of Carbon MEMS - San Diego State University, San Diego, United States Duration: 10 Jun 2018 → 12 Jun 2018 http://www.cmems2018.com

Conference	International Conference on Expanding Frontiers of Carbon MEMS
Location	San Diego State University
Country/Territory	United States
City	San Diego
Period	10/06/2018 → 12/06/2018
Internet address	http://www.cmems2018.com

Access to Document

@conference{8d13ec92aca6495fa39b7797e949750d,

title = "Pyrolytic carbon for MEMS string resonantors",

author = "Nguyen, {Quang Long} and Larsen, {Peter Emil} and Anja Boisen and Keller, {Stephan Sylvest}",

year = "2018",

language = "English",

note = "International Conference on Expanding Frontiers of Carbon MEMS, C-MEMS 2018 ; Conference date: 10-06-2018 Through 12-06-2018",

url = "http://www.cmems2018.com",

}