Pyrolytic carbon for MEMS string resonantors

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
EventInternational Conference on Expanding Frontiers of Carbon MEMS - San Diego State University, San Diego, United States
Duration: 10 Jun 201812 Jun 2018
http://www.cmems2018.com

Conference

ConferenceInternational Conference on Expanding Frontiers of Carbon MEMS
LocationSan Diego State University
CountryUnited States
CitySan Diego
Period10/06/201812/06/2018
Internet address

Cite this

Nguyen, Q. L., Larsen, P. E., Boisen, A., & Keller, S. S. (2018). Pyrolytic carbon for MEMS string resonantors. Abstract from International Conference on Expanding Frontiers of Carbon MEMS, San Diego, United States.
Nguyen, Quang Long ; Larsen, Peter Emil ; Boisen, Anja ; Keller, Stephan Sylvest. / Pyrolytic carbon for MEMS string resonantors. Abstract from International Conference on Expanding Frontiers of Carbon MEMS, San Diego, United States.
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title = "Pyrolytic carbon for MEMS string resonantors",
author = "Nguyen, {Quang Long} and Larsen, {Peter Emil} and Anja Boisen and Keller, {Stephan Sylvest}",
year = "2018",
language = "English",
note = "International Conference on Expanding Frontiers of Carbon MEMS, C-MEMS 2018 ; Conference date: 10-06-2018 Through 12-06-2018",
url = "http://www.cmems2018.com",

}

Nguyen, QL, Larsen, PE, Boisen, A & Keller, SS 2018, 'Pyrolytic carbon for MEMS string resonantors', International Conference on Expanding Frontiers of Carbon MEMS, San Diego, United States, 10/06/2018 - 12/06/2018.

Pyrolytic carbon for MEMS string resonantors. / Nguyen, Quang Long; Larsen, Peter Emil; Boisen, Anja; Keller, Stephan Sylvest.

2018. Abstract from International Conference on Expanding Frontiers of Carbon MEMS, San Diego, United States.

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

TY - ABST

T1 - Pyrolytic carbon for MEMS string resonantors

AU - Nguyen, Quang Long

AU - Larsen, Peter Emil

AU - Boisen, Anja

AU - Keller, Stephan Sylvest

PY - 2018

Y1 - 2018

M3 - Conference abstract for conference

ER -

Nguyen QL, Larsen PE, Boisen A, Keller SS. Pyrolytic carbon for MEMS string resonantors. 2018. Abstract from International Conference on Expanding Frontiers of Carbon MEMS, San Diego, United States.