Pyrolytic carbon for MEMS string resonantors

Quang Long Nguyen, Peter Emil Larsen, Anja Boisen, Stephan Sylvest Keller

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2018
Publication statusPublished - 2018
EventInternational Conference on Expanding Frontiers of Carbon MEMS - San Diego State University, San Diego, United States
Duration: 10 Jun 201812 Jun 2018
http://www.cmems2018.com

Conference

ConferenceInternational Conference on Expanding Frontiers of Carbon MEMS
LocationSan Diego State University
Country/TerritoryUnited States
CitySan Diego
Period10/06/201812/06/2018
Internet address

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