Abstract
This work presents the fabrication and characterization of suspended three-dimensional (3D) pyrolytic carbon microelectrodes for electrochemical applications. For this purpose, an optimized process with multiple steps of UV photolithography with the negative tone photoresist SU-8 followed by pyrolysis at 900ºC for 1h was developed. With this process, microelectrode chips with a three electrode configuration were fabricated and characterized with cyclic voltammetry (CV) using a 10mM potassium ferri-ferrocyanide redox probe in a custom made batch system with magnetic clamping. The 3D pyrolytic carbon microelectrodes displayed twice the higher peak current compared to 2D.
Original language | English |
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Journal | ECS Transactions |
Volume | 72 |
Issue number | 1 |
Pages (from-to) | 117-124 |
Number of pages | 8 |
ISSN | 1938-6737 |
DOIs | |
Publication status | Published - 2016 |