Pure and Sn-doped ZnO films produced by pulsed laser deposition

E. Holmelund; Jørgen Schou; S. Tougaard; N.B. Larsen

doi:10.1016/S0169-4332(02)00367-7

Pure and Sn-doped ZnO films produced by pulsed laser deposition

E. Holmelund, Jørgen Schou, S. Tougaard, N.B. Larsen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration. (C) 2002 Elsevier Science B.V. All rights reserved.

Original language	English
Journal	Applied Surface Science
Volume	197/198
Pages (from-to)	467-471
ISSN	0169-4332
DOIs	https://doi.org/10.1016/S0169-4332(02)00367-7
Publication status	Published - 2002

Keywords

Pulsed laser deposition
Transparent conductors
ZnO

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@article{173b1e24cbc94e7a8ea2f9e2615fb58a,

title = "Pure and Sn-doped ZnO films produced by pulsed laser deposition",

abstract = "A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration. (C) 2002 Elsevier Science B.V. All rights reserved. ",

keywords = "6-I optik, Pulsed laser deposition, Transparent conductors, ZnO",

author = "E. Holmelund and J{\o}rgen Schou and S. Tougaard and N.B. Larsen",

year = "2002",

doi = "10.1016/S0169-4332(02)00367-7",

language = "English",

volume = "197/198",

pages = "467--471",

journal = "Applied Surface Science",

issn = "0169-4332",

}

TY - JOUR

T1 - Pure and Sn-doped ZnO films produced by pulsed laser deposition

AU - Holmelund, E.

AU - Schou, Jørgen

AU - Tougaard, S.

AU - Larsen, N.B.

PY - 2002

Y1 - 2002

N2 - A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration. (C) 2002 Elsevier Science B.V. All rights reserved.

AB - A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration. (C) 2002 Elsevier Science B.V. All rights reserved.

KW - 6-I optik

KW - Pulsed laser deposition

KW - Transparent conductors

KW - ZnO

U2 - 10.1016/S0169-4332(02)00367-7

DO - 10.1016/S0169-4332(02)00367-7

M3 - Journal article

SN - 0169-4332

VL - 197/198

SP - 467

EP - 471

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Pure and Sn-doped ZnO films produced by pulsed laser deposition

Abstract

Keywords

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