Pure and Sn-doped ZnO films produced by pulsed laser deposition

E. Holmelund, Jørgen Schou, S. Tougaard, N.B. Larsen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    A new technique, metronome doping, has been used for doping of films during pulsed laser deposition (PLD). This technique makes it possible to dope continuously during film growth with different concentrations of a dopant in one deposition sequence. Films of pure and doped ZnO have been produced with Sn concentrations up to 16%. The specific resistivity is found to increase and the transmission of visible light to decrease with increasing Sn concentration. (C) 2002 Elsevier Science B.V. All rights reserved.
    Original languageEnglish
    JournalApplied Surface Science
    Volume197/198
    Pages (from-to)467-471
    ISSN0169-4332
    DOIs
    Publication statusPublished - 2002

    Keywords

    • Pulsed laser deposition
    • Transparent conductors
    • ZnO

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