Pulsed laser deposition of aluminum-doped ZnO films at 355 nm

E. Holmelund, Jørgen Schou, Birgitte Thestrup Nielsen, S. Tougaard, Erik Johnson, Martin Meedom Nielsen

Research output: Contribution to journalJournal articleResearchpeer-review


Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the films is about 0.9 which is comparable to the transmission through films deposited with short-wavelength lasers. The polycrystalline structure of the films is similar to that of films produced by shorter wavelengths as well.
Original languageEnglish
JournalApplied Physics A: Materials Science & Processing
Issue number4-6
Pages (from-to)1137-1139
Publication statusPublished - 2004


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