TY - JOUR
T1 - Pulsed laser deposition of aluminum-doped ZnO films at 355 nm
AU - Holmelund, E.
AU - Schou, Jørgen
AU - Thestrup Nielsen, Birgitte
AU - Tougaard, S.
AU - Johnson, Erik
AU - Nielsen, Martin Meedom
PY - 2004
Y1 - 2004
N2 - Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the films is about 0.9 which is comparable to the transmission through films deposited with short-wavelength lasers. The polycrystalline structure of the films is similar to that of films produced by shorter wavelengths as well.
AB - Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the films is about 0.9 which is comparable to the transmission through films deposited with short-wavelength lasers. The polycrystalline structure of the films is similar to that of films produced by shorter wavelengths as well.
KW - 6-I optik
U2 - 10.1007/s00339-004-2663-5
DO - 10.1007/s00339-004-2663-5
M3 - Journal article
SN - 0947-8396
VL - 79
SP - 1137
EP - 1139
JO - Applied Physics A: Materials Science & Processing
JF - Applied Physics A: Materials Science & Processing
IS - 4-6
ER -