Pulsed laser deposition from ZnS and Cu2SnS3 multicomponent targets

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Thin films of ZnS and Cu2SnS3have been produced by pulsed laser deposition (PLD), the latter for the firsttime. The effect of fluence and deposition temperature on the structure and the transmission spectrumas well as the deposition rate has been investigated, as has the stoichiometry of the films transferredfrom target to substrate. Elemental analysis by energy dispersive X-ray spectroscopy indicates lower Sand Sn content in Cu2SnS3films produced at higher fluence, whereas this trend is not seen in ZnS. Thedeposition rate of the compound materials measured in atoms per pulse is considerably larger than thatof the individual metals, Zn, Cu, and Sn.
Original languageEnglish
JournalApplied Surface Science
Pages (from-to)385-390
Publication statusPublished - 2015


  • PLD
  • Pulsed laser deposition
  • Zinc sulfide
  • Copper tin sulfide
  • ZnSCu2SnS3a


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