Pulse Reversal PermAlloy Plating Process for MEMS Applications

Kristian Smistrup, Peter Torben Tang, Per Møller

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

    242 Downloads (Pure)
    Original languageEnglish
    Title of host publicationMeeting Abstracts - Electrochemical Society
    PublisherThe Electrochemical Society
    Publication date2006
    PagesAbstract 1673
    Publication statusPublished - 2006
    Event213th ECS Meeting - Phoenix, United States
    Duration: 18 May 200823 May 2008
    Conference number: 213


    Conference213th ECS Meeting
    Country/TerritoryUnited States
    Internet address

    Bibliographical note

    Copyright The Electrochemical Society, Inc. [2006]. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS).

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