Pulse Reversal PermAlloy Plating Process for MEMS Applications

Kristian Smistrup, Peter Torben Tang, Per Møller

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsResearchpeer-review

    178 Downloads (Pure)
    Original languageEnglish
    Title of host publicationMeeting Abstracts - Electrochemical Society
    PublisherThe Electrochemical Society
    Publication date2006
    PagesAbstract 1673
    Publication statusPublished - 2006
    Event213th ECS Meeting - Phoenix, United States
    Duration: 18 May 200823 May 2008
    Conference number: 213
    http://www.electrochem.org/meetings/biannual/213/213.htm

    Conference

    Conference213th ECS Meeting
    Number213
    CountryUnited States
    CityPhoenix
    Period18/05/200823/05/2008
    Internet address

    Bibliographical note

    Copyright The Electrochemical Society, Inc. [2006]. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS).

    Cite this