Nickel-iron, and especially Permalloy, plating has been knownand used for more than 40 years, but there are still severalproblems related to stability and maintenance that should beresolved. This paper presents a saccharine-free pulse reversalplating Permalloy electrolyte, which gives low-stress deposits.We demonstrate selected MEMS applications of the electrolyte.The use of the strong complexing agent 5-sulfosalicylic acidallows for a photometric determination of the Fe3+-level in thebath and eliminate precipitates. This makes the electrolytesuitable as a Permalloy plating process used on an irregular basis.
|Journal||E C S Transactions|
|Publication status||Published - 2007|
|Event||ECS Meeting : Magnetic Materials Processes, and Devices 9 - Cancun, Mexico|
Duration: 1 Jan 2006 → …
Conference number: 210th
|Conference||ECS Meeting : Magnetic Materials Processes, and Devices 9|
|Period||01/01/2006 → …|