Pulse mode readout of MEMS bulk disk resonator based mass sensor

Meng Tang, Alberto Cagliani, Zachary James Davis

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We propose a pulse excitation setup applied on a Micro-Electro-Mechanical bulk disk resonator aimed for mass detection. This scheme offers measuring not only the resonant frequency, which defines the mass change, but also the quality factor and the feedthrough/parasitic capacitance of the disk which can provide information about the environment. This technique is independent of the parallel capacitor which generates an extra anti-resonance during the conventional frequency response measurement method. Furthermore, it also permits exciting resonators with different resonant frequencies with a unique input signal within a range of 300kHz. In addition, the readout method is high speed with no complicated feedback configuration. Here we present a full electro-mechanical model, predicting the behavior of the disk, and the model is verified by the experimental results.
    Original languageEnglish
    JournalSensors & Actuators: A. Physical
    Volume168
    Issue number1
    Pages (from-to)39-45
    ISSN0924-4247
    DOIs
    Publication statusPublished - 2011

    Keywords

    • Time transient response
    • Pulse mode
    • Mass sensor
    • Disk resonator

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