Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

Meng Tang; Alberto Cagliani; Zachary James Davis; Lin He

doi:10.1109/NEMS.2014.6908794

Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

Meng Tang, Alberto Cagliani, Zachary James Davis, Lin He

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.

Original language	English
Title of host publication	Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA
Number of pages	4
Publisher	IEEE
Publication date	2014
Pages	216-219
ISBN (Print)	978-1-4799-4726-3
DOIs	https://doi.org/10.1109/NEMS.2014.6908794
Publication status	Published - 2014
Event	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Hyatt Regency Waikiki Beach Resort and Spa, Honolulu, United States Duration: 13 Apr 2014 → 16 Apr 2014 Conference number: 9

Conference

Conference	9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Number	9
Location	Hyatt Regency Waikiki Beach Resort and Spa
Country/Territory	United States
City	Honolulu
Period	13/04/2014 → 16/04/2014

Keywords

Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Robotics and Control Systems
Frequency measurement
Humidity
Humidity measurement
humidity sensing
mass sensing
Micromechanical devices
pulse mode
resonant frequency
Sensors
Vibrations

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10.1109/NEMS.2014.6908794

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title = "Pulse mode actuation-readout system based on MEMS resonator for liquid sensing",

abstract = "A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.",

keywords = "Bioengineering, Communication, Networking and Broadcast Technologies, Components, Circuits, Devices and Systems, Engineered Materials, Dielectrics and Plasmas, Photonics and Electrooptics, Robotics and Control Systems, Frequency measurement, Humidity, Humidity measurement, humidity sensing, mass sensing, Micromechanical devices, pulse mode, resonant frequency, Sensors, Vibrations",

author = "Meng Tang and Alberto Cagliani and Davis, {Zachary James} and Lin He",

year = "2014",

doi = "10.1109/NEMS.2014.6908794",

language = "English",

isbn = "978-1-4799-4726-3",

pages = "216--219",

booktitle = "Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA",

publisher = "IEEE",

address = "United States",

note = "9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS2014 ; Conference date: 13-04-2014 Through 16-04-2014",

}

Tang, M, Cagliani, A, Davis, ZJ & He, L 2014, Pulse mode actuation-readout system based on MEMS resonator for liquid sensing. in Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA. IEEE, pp. 216-219, 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Honolulu, United States, 13/04/2014. https://doi.org/10.1109/NEMS.2014.6908794

Pulse mode actuation-readout system based on MEMS resonator for liquid sensing. / Tang, Meng; Cagliani, Alberto; Davis, Zachary James et al.
Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA. IEEE, 2014. p. 216-219.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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AU - He, Lin

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N2 - A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.

AB - A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.

KW - Bioengineering

KW - Communication, Networking and Broadcast Technologies

KW - Components, Circuits, Devices and Systems

KW - Engineered Materials, Dielectrics and Plasmas

KW - Photonics and Electrooptics

KW - Robotics and Control Systems

KW - Frequency measurement

KW - Humidity

KW - Humidity measurement

KW - humidity sensing

KW - mass sensing

KW - Micromechanical devices

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KW - resonant frequency

KW - Sensors

KW - Vibrations

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BT - Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA

PB - IEEE

T2 - 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Y2 - 13 April 2014 through 16 April 2014

ER -

Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

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Keywords

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