Pulse mode actuation-readout system based on MEMS resonator for liquid sensing

Meng Tang, Alberto Cagliani, Zachary James Davis, Lin He

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
    Original languageEnglish
    Title of host publicationProceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA
    Number of pages4
    PublisherIEEE
    Publication date2014
    Pages216-219
    ISBN (Print)978-1-4799-4726-3
    DOIs
    Publication statusPublished - 2014
    Event9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Hyatt Regency Waikiki Beach Resort and Spa, Honolulu, United States
    Duration: 13 Apr 201416 Apr 2014
    Conference number: 9

    Conference

    Conference9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
    Number9
    LocationHyatt Regency Waikiki Beach Resort and Spa
    CountryUnited States
    CityHonolulu
    Period13/04/201416/04/2014

    Keywords

    • Bioengineering
    • Communication, Networking and Broadcast Technologies
    • Components, Circuits, Devices and Systems
    • Engineered Materials, Dielectrics and Plasmas
    • Photonics and Electrooptics
    • Robotics and Control Systems
    • Frequency measurement
    • Humidity
    • Humidity measurement
    • humidity sensing
    • mass sensing
    • Micromechanical devices
    • pulse mode
    • resonant frequency
    • Sensors
    • Vibrations

    Cite this

    Tang, M., Cagliani, A., Davis, Z. J., & He, L. (2014). Pulse mode actuation-readout system based on MEMS resonator for liquid sensing. In Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems April 13-16, 2014, Hawaii, USA (pp. 216-219). IEEE. https://doi.org/10.1109/NEMS.2014.6908794