Protective coatings in harsh environments

Gert Frii Eriksen, K. Dyrbye

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    In collaboration with Danfoss A/S, Brüel & Kjær A/S and Mikroelectronik Centret The chemical stability of different coatings for micromechanical sensors is investigated. The coatings included are standard passivation layers in the IC industry: silicon oxide, silicon nitride and silicon carbide. The corrosion rates of these materials are tested in water based media with varying pH values and temperatures. Homogenous corrosion is observed yielding etch rates up to 1000 Å h-1 for silicon oxide, 70 Å h-1 for silicon nitride and 2.6 Å h-1 for silicon carbide at 140°C in potassium hydroxide.
    Original languageEnglish
    JournalJournal of Micromechanics and Microengineering
    Volume6
    Issue number1
    Pages (from-to)55-57
    ISSN0960-1317
    DOIs
    Publication statusPublished - 1996

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