"Protection of H-Passivated Silicon Surfaces by Room Temperature Direct Bonding"

Karin Ljungberg, Francois Grey

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Electrochemical Society PV 97-36
    PublisherThe Electrochemical Society
    Publication date1997
    Pages445-452
    Publication statusPublished - 1997

    Cite this

    Ljungberg, K., & Grey, F. (1997). "Protection of H-Passivated Silicon Surfaces by Room Temperature Direct Bonding". In Proceedings of the Electrochemical Society PV 97-36 (pp. 445-452). The Electrochemical Society.