"Protection of H-Passivated Silicon Surfaces by Room
                Temperature Direct Bonding"

Karin Ljungberg, Francois Grey

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Electrochemical Society PV 97-36
Publisher	The Electrochemical Society
Publication date	1997
Pages	445-452
Publication status	Published - 1997

OpenUrl availability

@inbook{586d19cc824d481197468d6e164a3b26,

title = "{"}Protection of H-Passivated Silicon Surfaces by Room Temperature Direct Bonding{"}",

author = "Karin Ljungberg and Francois Grey",

year = "1997",

language = "English",

pages = "445--452",

booktitle = "Proceedings of the Electrochemical Society PV 97-36",

publisher = "The Electrochemical Society",

}