Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Mirza Karamehmedović; Poul-Erik Hansen; Kai Dirscherl; Emir Karamehmedovic; Thomas Wriedt

doi:10.1364/OE.20.021678

Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Mirza Karamehmedović
, Poul-Erik Hansen
, Kai Dirscherl
, Emir Karamehmedovic
, Thomas Wriedt

DFM - Dansk Fundamental Metrologi A/S
Leibniz Institute for Materials Engineering
University of Sarajevo
University of Bremen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.

Original language	English
Journal	Optics Express
Volume	20
Issue number	19
Pages (from-to)	21678-21686
ISSN	1094-4087
DOIs	https://doi.org/10.1364/OE.20.021678
Publication status	Published - 2012
Externally published	Yes

Keywords

Nondestructive testing
Inverse scattering

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10.1364/OE.20.021678

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title = "Profile estimation for Pt submicron wire on rough Si substrate from experimental data",

abstract = "An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.",

keywords = "Nondestructive testing, Inverse scattering",

author = "Mirza Karamehmedovi{\'c} and Poul-Erik Hansen and Kai Dirscherl and Emir Karamehmedovic and Thomas Wriedt",

year = "2012",

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language = "English",

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pages = "21678--21686",

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AU - Karamehmedović, Mirza

AU - Hansen, Poul-Erik

AU - Dirscherl, Kai

AU - Karamehmedovic, Emir

AU - Wriedt, Thomas

PY - 2012

Y1 - 2012

N2 - An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.

AB - An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.

KW - Nondestructive testing

KW - Inverse scattering

U2 - 10.1364/OE.20.021678

DO - 10.1364/OE.20.021678

M3 - Journal article

SN - 1094-4087

VL - 20

SP - 21678

EP - 21686

JO - Optics Express

JF - Optics Express

IS - 19

ER -

Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Abstract

Keywords

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