Profile estimation for Pt submicron wire on rough Si substrate from experimental data

Mirza Karamehmedović, Poul-Erik Hansen, Kai Dirscherl, Emir Karamehmedovic, Thomas Wriedt

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.
Original languageEnglish
JournalOptics Express
Volume20
Issue number19
Pages (from-to)21678-21686
ISSN1094-4087
DOIs
Publication statusPublished - 2012
Externally publishedYes

Keywords

  • Nondestructive testing
  • Inverse scattering

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