Abstract
Replication processes for the manufacturing of micro/nano-structured components are characterized by a certain degree of precision and accuracy. The transcription loss, or replication fidelity, defines the geometrical and dimensional correspondence of micro/nano-structure from metal tool inserts into plastic patterned products. The employment of a vast spectrum of micro/nano-structured geometries calls for methodologies that can be used for the estimation of replication fidelity. This study presents a number of product fingerprints, which propose multiple ways to characterize micro/nano structures in replication technologies. Replication fidelity yielded values above 80% and up to 96% depending on the considered product fingerprints and their definition. Thereafter, a correlation of the product fingerprint with the process parameters was found to optimize the replication process. Measurement uncertainty accompanies the analysis of the product fingerprints, enabling a standardized, robust, and quantitative methodology for process learning, modeling, and optimization.
| Original language | English |
|---|---|
| Journal | Nanomanufacturing and Metrology |
| Volume | 4 |
| Pages (from-to) | 278–288 |
| ISSN | 2520-8128 |
| DOIs | |
| Publication status | Published - 2021 |
Keywords
- Micro/nano replication
- Product fingerprinting
- Metrology
- Micro injection molding
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