Processing of thin SU-8 films

Stephan Urs Keller, Gabriela Blagoi, Michael Lillemose, Daniel Häfliger, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	12
Pages (from-to)	125020
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/18/12/125020
Publication status	Published - 2008

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title = "Processing of thin SU-8 films",

author = "Keller, {Stephan Urs} and Gabriela Blagoi and Michael Lillemose and Daniel H{\"a}fliger and Anja Boisen",

year = "2008",

doi = "10.1088/0960-1317/18/12/125020",

language = "English",

volume = "18",

pages = "125020",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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TY - JOUR

T1 - Processing of thin SU-8 films

AU - Keller, Stephan Urs

AU - Blagoi, Gabriela

AU - Lillemose, Michael

AU - Häfliger, Daniel

AU - Boisen, Anja

PY - 2008

Y1 - 2008

U2 - 10.1088/0960-1317/18/12/125020

DO - 10.1088/0960-1317/18/12/125020

M3 - Journal article

SN - 0960-1317

VL - 18

SP - 125020

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 12

ER -