Abstract
A probe for testing electrical properties of test samples includes a body having a probe arm defining proximal and distal ends, the probe arm extending from the body at the proximal end of the probe arm, whereby a first axis is defined by the proximal and the distal ends. The probe arm defines a geometry allowing flexible movement of the probe arm along the first axis and along a second axis perpendicular to the first axis, and along a third axis orthogonal to a plane defined by the first axis and the second axis.
Original language | English |
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IPC | G01R31/00 |
Patent number | US8310258 |
Filing date | 13/11/2012 |
Country/Territory | United States |
Priority date | 31/10/2006 |
Priority number | WO2006DK00603 |
Publication status | Published - 2012 |