Probe Diagnostics of Diffused Ar/SF6 plasmas

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Original languageEnglish
Title of host publicationProceedings of 24th International Conference on Phenomena in Ionized Gases
Number of pages2
Volume2
Publication date1999
Pages41-42
ISBN (Print)83-902319-5-6
Publication statusPublished - 1999
Externally publishedYes
Event24th International Conference on Phenomena in Ionized Gases (XXIV ICPIG) - Warsaw, Poland
Duration: 11 Jul 199916 Jul 1999

Conference

Conference24th International Conference on Phenomena in Ionized Gases (XXIV ICPIG)
CountryPoland
CityWarsaw
Period11/07/199916/07/1999

Cite this

Stamate, E., & Ohe, K. (1999). Probe Diagnostics of Diffused Ar/SF6 plasmas. In Proceedings of 24th International Conference on Phenomena in Ionized Gases (Vol. 2, pp. 41-42) https://inis.iaea.org/search/search.aspx?orig_q=RN:33059993