Abstract
A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting
temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF6, and O2 show good agreement among the plasma parameters using thermal and Langmuir probes. © 2002 American
Institute of Physics
temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF6, and O2 show good agreement among the plasma parameters using thermal and Langmuir probes. © 2002 American
Institute of Physics
Original language | English |
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Journal | Applied Physics Letters |
Volume | 80 |
Issue number | 17 |
Pages (from-to) | 3066-3068 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2002 |
Externally published | Yes |