Principle and application of a thermal probe to reactive plasmas

Eugen Stamate, H. Sugai, K. Ohe

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Abstract

A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting
temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance. The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF6, and O2 show good agreement among the plasma parameters using thermal and Langmuir probes. © 2002 American
Institute of Physics
Original languageEnglish
JournalApplied Physics Letters
Volume80
Issue number17
Pages (from-to)3066-3068
ISSN0003-6951
DOIs
Publication statusPublished - 2002
Externally publishedYes

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