Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range

R. Xu, L.M. Borregaard, A. Lei, M. Guizzetti, E. Ringgaard, T. Zawada, Ole Hansen, E.V. Thomsen, Jan Dziuban (Editor), Rafal Walczak (Editor)

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.
Original languageEnglish
JournalProcedia Engineering
Volume47
Pages (from-to)1434-1437
ISSN1877-7058
DOIs
Publication statusPublished - 2012
EventEurosensors 2012: 26th European Conference on Solid-State Transducers - Krakow, Poland
Duration: 9 Sep 201212 Sep 2012
Conference number: 26

Conference

ConferenceEurosensors 2012
Number26
CountryPoland
CityKrakow
Period09/09/201212/09/2012

Keywords

  • Energy harvester
  • MEMS
  • Piezoelectric
  • Temperature range
  • Performance

Cite this

Xu, R., Borregaard, L. M., Lei, A., Guizzetti, M., Ringgaard, E., Zawada, T., Hansen, O., Thomsen, E. V., Dziuban, J. (Ed.), & Walczak, R. (Ed.) (2012). Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range. Procedia Engineering, 47, 1434-1437. https://doi.org/10.1016/j.proeng.2012.09.427