Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range

R. Xu; L.M. Borregaard; A. Lei; M. Guizzetti; E. Ringgaard; T. Zawada; Ole Hansen; E.V. Thomsen; Jan  Dziuban; Rafal  Walczak

doi:10.1016/j.proeng.2012.09.427

Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range

R. Xu, L.M. Borregaard, A. Lei, M. Guizzetti, E. Ringgaard, T. Zawada, Ole Hansen, E.V. Thomsen, Jan Dziuban (Editor), Rafal Walczak (Editor)

Surface Physics and Catalysis

Meggitt A/S

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.

Original language	English
Journal	Procedia Engineering
Volume	47
Pages (from-to)	1434-1437
ISSN	1877-7058
DOIs	https://doi.org/10.1016/j.proeng.2012.09.427
Publication status	Published - 2012
Event	Eurosensors 2012: 26th European Conference on Solid-State Transducers - Krakow, Poland Duration: 9 Sept 2012 → 12 Sept 2012 Conference number: 26

Conference

Conference	Eurosensors 2012
Number	26
Country/Territory	Poland
City	Krakow
Period	09/09/2012 → 12/09/2012

Keywords

Energy harvester
MEMS
Piezoelectric
Temperature range
Performance

Access to Document

10.1016/j.proeng.2012.09.427

OpenUrl availability

Full text

Cite this

@inproceedings{b8b498525d114481b770eb42660e7cae,

title = "Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range",

abstract = "In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.",

keywords = "Energy harvester, MEMS, Piezoelectric, Temperature range, Performance",

author = "R. Xu and L.M. Borregaard and A. Lei and M. Guizzetti and E. Ringgaard and T. Zawada and Ole Hansen and E.V. Thomsen and Jan Dziuban and Rafal Walczak",

year = "2012",

doi = "10.1016/j.proeng.2012.09.427",

language = "English",

volume = "47",

pages = "1434--1437",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

note = "Eurosensors 2012 : 26th European Conference on Solid-State Transducers ; Conference date: 09-09-2012 Through 12-09-2012",

}

TY - GEN

T1 - Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range

AU - Xu, R.

AU - Borregaard, L.M.

AU - Lei, A.

AU - Guizzetti, M.

AU - Ringgaard, E.

AU - Zawada, T.

AU - Hansen, Ole

AU - Thomsen, E.V.

A2 - Dziuban, Jan

A2 - Walczak, Rafal

N1 - Conference code: 26

PY - 2012

Y1 - 2012

N2 - In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.

AB - In this work a batch of MEMS-based vibration energy harvesters consisting of a silicon/PZT thick film ntilever with integrated proof mass is characterized. The purpose of a vibration energy harvester is to convert low grade vibrations to useful electrical power. Optimally, the natural frequency of the harvester should match the frequency of he ambient vibration. The first step to achieve this is to evaluate the uniformity of the fabricated harvesters and nderstand the effects of temperature on the harvesters during operation. Therefore, the uniformity of 40 energy harvesters from one wafer has been evaluated. Thereafter the performance of the energy harvesters operating at emperatures between -30°C to 100°C was measured.

KW - Energy harvester

KW - MEMS

KW - Piezoelectric

KW - Temperature range

KW - Performance

U2 - 10.1016/j.proeng.2012.09.427

DO - 10.1016/j.proeng.2012.09.427

M3 - Conference article

SN - 1877-7058

VL - 47

SP - 1434

EP - 1437

JO - Procedia Engineering

JF - Procedia Engineering

T2 - Eurosensors 2012

Y2 - 9 September 2012 through 12 September 2012

ER -

Preliminary Performance Evaluation of MEMS-based Piezoelectric Energy Harvesters in Extended Temperature Range

Abstract

Conference

Keywords

Access to Document

OpenUrl availability

Fingerprint

Cite this