Precision of single-engage micro Hall effect measurements

Henrik Hartmann Henrichsen, Ole Hansen, Daniel Kjær, P.F. Nielsen, Fei Wang, Dirch Hjorth Petersen

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Recently a novel microscale Hall effect measurement technique has been developed to extract sheet resistance (RS), Hall sheet carrier density (NHS)
and Hall mobility (μH) from collinear micro 4-point probe measurements in the vicinity of an insulating boundary [1]. The technique measures in less than a
minute directly the local transport properties, which enables in-line production monitoring on scribe line test pads [2]. To increase measurement speed and
reliability, a method in which 4-point measurements are performed using two different electrode pitches has been developed [3]. In this study we calculate the
measurement error on RS, NHS and μH resulting from electrode position errors, probe placement, sample size and Hall signal magnitude. We show the relationship between measurement precision and electrode pitch, which is important when down-scaling the micro 4-point probe to fit smaller test pads. The study is based on Monte Carlo simulations.
Original languageEnglish
Title of host publicationProceedings of the 14th International Workshop on Junction Technology
Number of pages4
Publication date2014
Publication statusPublished - 2014
Event14th International Workshop on Junction Technology - Shanghai, China
Duration: 18 May 201420 May 2014
Conference number: 14


Conference14th International Workshop on Junction Technology
Internet address


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