Precision of Micro Hall Effect Measurements in Scribe Line Test Pads

Maria-Louise Witthøft, Frederik Westergaard Østerberg, Janusz Bogdanowicz, Andreas Schulze, Wilfried Vanderhorst, Henrik Hartmann Henrichsen, Peter D. Nielsen, Ole Hansen, Dirch Hjorth Petersen

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    107 Downloads (Pure)
    Original languageEnglish
    Publication date2017
    Number of pages3
    Publication statusPublished - 2017
    EventInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017 - Monterey Marriott, Monterey, CA, United States
    Duration: 21 Mar 201723 Mar 2017

    Conference

    ConferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
    LocationMonterey Marriott
    CountryUnited States
    CityMonterey, CA
    Period21/03/201723/03/2017

    Cite this

    Witthøft, M-L., Østerberg, F. W., Bogdanowicz, J., Schulze, A., Vanderhorst, W., Hartmann Henrichsen, H., Nielsen, P. D., Hansen, O., & Petersen, D. H. (2017). Precision of Micro Hall Effect Measurements in Scribe Line Test Pads. Abstract from International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.