Precision of Micro Hall Effect Measurements in Scribe Line Test Pads

Maria-Louise Witthøft, Frederik Westergaard Østerberg, Janusz Bogdanowicz, Andreas Schulze, Wilfried Vanderhorst, Henrik Hartmann Henrichsen, Peter D. Nielsen, Ole Hansen, Dirch Hjorth Petersen

    Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

    122 Downloads (Pure)
    Original languageEnglish
    Publication date2017
    Number of pages3
    Publication statusPublished - 2017
    EventInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017 - Monterey Marriott, Monterey, CA, United States
    Duration: 21 Mar 201723 Mar 2017

    Conference

    ConferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
    LocationMonterey Marriott
    CountryUnited States
    CityMonterey, CA
    Period21/03/201723/03/2017

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