Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

Maria-Louise Witthøft; Frederik Westergaard Østerberg; Janusz Bogdanowicz; Andreas Schulze; Wilfried Vandervorst; Rong Lin; Henrik Hartmann Henrichsen; Peter F. Nielsen; Ole Hansen; Dirch Hjorth Petersen

Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

Maria-Louise Witthøft, Frederik Westergaard Østerberg, Janusz Bogdanowicz, Andreas Schulze, Wilfried Vandervorst, Rong Lin, Henrik Hartmann Henrichsen, Peter F. Nielsen, Ole Hansen, Dirch Hjorth Petersen

Surface Physics and Catalysis

Research output: Contribution to conference › Poster › Research › peer-review

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Original language	English
Publication date	2017
Publication status	Published - 2017
Event	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017 - Monterey Marriott, Monterey, CA, United States Duration: 21 Mar 2017 → 23 Mar 2017

Conference

Conference	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
Location	Monterey Marriott
Country/Territory	United States
City	Monterey, CA
Period	21/03/2017 → 23/03/2017

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Poster FCMN 2017Final published version, 591 KB

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International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
Witthøft, M.-L. (Participant)
21 Mar 2017 → 23 Mar 2017
Activity: Attending an event › Participating in or organising a conference

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Witthøft, M.-L., Østerberg, F. W., Bogdanowicz, J., Schulze, A., Vandervorst, W., Lin, R., Hartmann Henrichsen, H., Nielsen, P. F., Hansen, O., & Petersen, D. H. (2017). Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe. Poster session presented at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.

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title = "Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe",

author = "Maria-Louise Witth{\o}ft and {\O}sterberg, {Frederik Westergaard} and Janusz Bogdanowicz and Andreas Schulze and Wilfried Vandervorst and Rong Lin and {Hartmann Henrichsen}, Henrik and Nielsen, {Peter F.} and Ole Hansen and Petersen, {Dirch Hjorth}",

year = "2017",

language = "English",

note = "International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, FCMN 2017 ; Conference date: 21-03-2017 Through 23-03-2017",

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Witthøft, M-L, Østerberg, FW, Bogdanowicz, J, Schulze, A, Vandervorst, W, Lin, R, Hartmann Henrichsen, H, Nielsen, PF, Hansen, O & Petersen, DH 2017, 'Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe', International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States, 21/03/2017 - 23/03/2017.

Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe. / Witthøft, Maria-Louise; Østerberg, Frederik Westergaard; Bogdanowicz, Janusz et al.
2017. Poster session presented at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.

Research output: Contribution to conference › Poster › Research › peer-review

TY - CONF

T1 - Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

AU - Witthøft, Maria-Louise

AU - Østerberg, Frederik Westergaard

AU - Bogdanowicz, Janusz

AU - Schulze, Andreas

AU - Vandervorst, Wilfried

AU - Lin, Rong

AU - Hartmann Henrichsen, Henrik

AU - Nielsen, Peter F.

AU - Hansen, Ole

AU - Petersen, Dirch Hjorth

PY - 2017

Y1 - 2017

M3 - Poster

T2 - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017

Y2 - 21 March 2017 through 23 March 2017

ER -

Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

Conference

Access to Document

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Activities

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017

Cite this