Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

Maria-Louise Witthøft, Frederik Westergaard Østerberg, Janusz Bogdanowicz, Andreas Schulze, Wilfried Vandervorst, Rong Lin, Henrik Hartmann Henrichsen, Peter F. Nielsen, Ole Hansen, Dirch Hjorth Petersen

Research output: Contribution to conferencePosterResearchpeer-review

62 Downloads (Pure)
Original languageEnglish
Publication date2017
Publication statusPublished - 2017
EventInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017 - Monterey Marriott, Monterey, CA, United States
Duration: 21 Mar 201723 Mar 2017

Conference

ConferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
LocationMonterey Marriott
CountryUnited States
CityMonterey, CA
Period21/03/201723/03/2017

Cite this

Witthøft, M-L., Østerberg, F. W., Bogdanowicz, J., Schulze, A., Vandervorst, W., Lin, R., Hartmann Henrichsen, H., Nielsen, P. F., Hansen, O., & Petersen, D. H. (2017). Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe. Poster session presented at International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017, Monterey, CA, United States.