Precipitation study in thin layers by grazing small-angle scattering of x-rays

Studies of thin layer by small-angle scattering of X-rays in the transmission mode give weak intensities because the X-ray path is short. Grazing-incidence X-ray scattering circumvents this difficulty for the analysis of a thin layer deposited on a substrate. Furthermore, for a bulk sample, grazing incidence is the only way to study the surface layer, and the penetration depth can be controlled by the incidence angle of the X-ray beam. In this study, we report on krypton and xenon bubbles which are precipitated in an aluminium single crystal and also in polycristaline deposited layers of metals. These inclusions are produced by ion implantation at room temperature. They are found solid by high-angle diffraction. Comparison between high-angle diffraction and small-angle scattering under grazing incidence lead to a better knowledge of these specific precipitated systems.