Abstract
We demonstrate that an amorphous As layer deposited as protection on a GaAs(001) surface frown by molecular beam epitaxy can be removed via reductive etching in an electrolytical cell at sufficiently negative electrode potentials. Employing a specially constructed electrochemical cell filled with H2SO4. we monitored the stripping process of the 50 nm As cap over a period of hours in situ with x-ray diffraction. Our results suggest that, using this potential controlled stripping, smooth and well ordered GaAs(001) surfaces can be obtained in an aqueous electrolyte. (C) 1997 American Institute of Physics.
Original language | English |
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Journal | Applied Physics Letters |
Volume | 71 |
Issue number | 20 |
Pages (from-to) | 2990-2992 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 1997 |