Potential controlled stripping of an amorphous As layer on GaAs(001) in an electrolyte: An in situ x-ray scattering study

G. Scherb, A. Kazimirov, J. Zegenhagen, T.M. Schultz, R. Feidenhans'l, B.O. Fimland

    Research output: Contribution to journalJournal articleResearch

    Abstract

    We demonstrate that an amorphous As layer deposited as protection on a GaAs(001) surface frown by molecular beam epitaxy can be removed via reductive etching in an electrolytical cell at sufficiently negative electrode potentials. Employing a specially constructed electrochemical cell filled with H2SO4. we monitored the stripping process of the 50 nm As cap over a period of hours in situ with x-ray diffraction. Our results suggest that, using this potential controlled stripping, smooth and well ordered GaAs(001) surfaces can be obtained in an aqueous electrolyte. (C) 1997 American Institute of Physics.
    Original languageEnglish
    JournalApplied Physics Letters
    Volume71
    Issue number20
    Pages (from-to)2990-2992
    ISSN0003-6951
    DOIs
    Publication statusPublished - 1997

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