PolyNano M.6.1.1 Process validation state-of-the-art: Final

Research output: Book/ReportReportpeer-review


An extensive state‐of‐the‐art research has been conducted in the field of replication of micro/nano geometries in order to assess the currently available capability both at research and application level. As it emerged from the investigation, polymers for devices and deposited metals for tool making are the main materials employed in surface micro/nano manufacturing process chains. Hence, the result from this overview is particularly important for PolyNano and its associated process chain.
This deliverable describes available concepts of replication, reports on different degree of replication assessment methods, and presents measuring procedures/techniques suitable for replication fidelity studies. The report reviews state‐of‐the‐art research results regarding replication obtained at different scales, tooling technologies based on surface replication, process validation trough design of experiment and uncertainty analysis. The focus is on polymeric materials and deposited metals; for completeness glass and bulk metallic glasses (BMG) are briefly described as well as they are also employed for surface micro/nano replication. As a mean of replication assessment, simulation for surface replication modelling and evaluation is also reviewed for the presented material categories.
As far as polymer replication is concerned, the currently available replication capability in terms of obtainable lateral and vertical dimensions is compared with the typical dimensional range target of the PolyNano project. Methods for replication process validation are presented and will be further investigated in WP6 “Process Chain Validation” and applied to PolyNano study cases. Based on the available information, effective best practice standard process validation will be defined and implemented in the subsequent WP6 future work.
Original languageEnglish
Number of pages44
Publication statusPublished - 2012
SeriesTechnical Report of DSF (Danish Council for Strategic Research) Project PolyNano


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