Abstract
The authors present an SU-8 cantilever chip with integrated piezoresistors for detection of surface stress changes due to adsorption of biomolecules on the cantilever surface. Mercaptohexanol is used as a model biomolecule to study molecular interactions with Au-coated SU-8 cantilevers and surface stress changes of about 0.1 N/m are observed. The measurements indicate that the SU-8 surface is inert to mercaptohexanol molecules, which enables the use of a bare SU-8 cantilever as a reference. Moreover, the sensitivity of the cantilevers to pH changes is presented. The results demonstrate that SU-8 cantilevers are a promising alternative to Si-based cantilevers. (c) 2006 American Institute of Physics.
Original language | English |
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Journal | Applied Physics Letters |
Volume | 89 |
Issue number | 17 |
Pages (from-to) | 173505 |
ISSN | 0003-6951 |
DOIs | |
Publication status | Published - 2006 |
Bibliographical note
Copyright (2006) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.Keywords
- SENSORS