Plasmonic Titanium Nitride Nanostructures via Nitridation of Nanopatterned Titanium Dioxide

Urcan Guler, Dmitry Zemlyanov, Jongbum Kim, Zhuoxian Wang, Rohith Chandrasekar, Xiangeng Meng, Eric A. Stach, Alexander V. Kildishev, Vladimir M. Shalaev, Alexandra Boltasseva

Research output: Contribution to journalJournal articleResearchpeer-review


Plasmonic titanium nitride nanostructures are obtained via nitridation of titanium dioxide. Nanoparticles acquired a cubic shape with sharper edges following the rock-salt crystalline structure of TiN. Lattice constant of the resulting TiN nanoparticles matched well with the tabulated data. Energy-filtered TEM images and XPS results showed that oxygen was replaced by nitrogen. In contrast to nanoscale processing challenges of refractory TiN, well-understood material synthesis of TiO2 provides an attractive route to large-scale fabrication of refractory plasmonic materials with complex designs at the nano- and microscales.
Original languageEnglish
Article number1600717
JournalAdvanced Optical Materials
Issue number7
Number of pages6
Publication statusPublished - 2017


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