Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films

Eugen Stamate, Ane Sælland Christiansen, Søren Højgaard Jensen, Poul Norby, Peter Holtappels

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Thirteenth International Conference on Plasma Surface Engineering
Publication date	2012
Publication status	Published - 2012
Event	13th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany Duration: 10 Sept 2012 → 14 Sept 2012 Conference number: 13

Conference	13th International Conference on Plasma Surface Engineering
Number	13
Country/Territory	Germany
City	Garmisch-Partenkirchen
Period	10/09/2012 → 14/09/2012

OpenUrl availability

@inproceedings{65f2e9d1cc784af4a7b079492f75114a,

title = "Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films",

author = "Eugen Stamate and Christiansen, {Ane S{\ae}lland} and Jensen, {S{\o}ren H{\o}jgaard} and Poul Norby and Peter Holtappels",

year = "2012",

language = "English",

booktitle = "Proceedings of the Thirteenth International Conference on Plasma Surface Engineering",

note = "13th International Conference on Plasma Surface Engineering ; Conference date: 10-09-2012 Through 14-09-2012",

}

Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films. / Stamate, Eugen; Christiansen, Ane Sælland; Jensen, Søren Højgaard et al.
Proceedings of the Thirteenth International Conference on Plasma Surface Engineering. 2012.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films

AU - Stamate, Eugen

AU - Christiansen, Ane Sælland

AU - Jensen, Søren Højgaard

AU - Norby, Poul

AU - Holtappels, Peter

N1 - Conference code: 13

PY - 2012

Y1 - 2012

M3 - Article in proceedings

BT - Proceedings of the Thirteenth International Conference on Plasma Surface Engineering

T2 - 13th International Conference on Plasma Surface Engineering

Y2 - 10 September 2012 through 14 September 2012

ER -