Plasma properties during RF magnetron sputtering of lithium phosphorous oxynitride thin films

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the Thirteenth International Conference on Plasma Surface Engineering
Publication date2012
Publication statusPublished - 2012
Event13th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany
Duration: 10 Sep 201214 Sep 2012
Conference number: 13

Conference

Conference13th International Conference on Plasma Surface Engineering
Number13
CountryGermany
CityGarmisch-Partenkirchen
Period10/09/201214/09/2012

Cite this