Plasma polymerization by Softplasma

J. Jiang, Zhenning Wu, Maike Benter, Katja Jankova Atanasova, R. Toboryski, Klaus Bechgaard

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review


In the late 19th century, the first depositions - known today as plasma polymers, were reported. In the last century, more and more research has been put into plasma polymers. Many different deposition systems have been developed. [1, 2] Shi F. F. broadly classified them into internal electrode, external electrode, and electrodeless microwave or high frequency reactors. [3] Softplasma™ is an internal electrode plasma setup powered by low frequenc~ gower supply. It was developed in late 90s for surface treatment of silicone rubber. [ ]- 5] It is a low pressure, low electron density, 3D homogenous plasma. In this study, we are presenting the surface modification"pf polymers by plasma polymerization using Softplasma™. Softplasma™ can be used for two major types of polymerization: polymerization of vinyl monomers, where plasma acts as initiator; chemical vapour deposition, where plasma acts as reactive splvent (as shown in Figure 1). 1] H. Biederman, in Plasma Polymer Films. (ed.) H. Biederman. Imperial College Press, Singapore, 13-24 ~OO~· '. , [2] R. d'Agostino et.a!. in Plasma Depd~itiqn, 'Treatment, and Etching ofPolymers. (ed.) R. d'Agostino, Academic Press, U.S. (1990). [3] F. F. Shi. Recent advances in polymer thin films prepared by plasma polymerization synthesis, structural characterization, properties and applications. Surface and Coating Technology 82, 1 (1996). [4] B. Winther-Jensen. WOO0235895A2. A method and apparatus for excitation of a plasma, (2002). [5]. K. Glejbol. EP00741408Bl. NKT Research Center AS. A method and an electrode system for excitation of a plasma (1996).
Original languageEnglish
Title of host publicationNordic Polymer Days 2008, Abstract Book
Number of pages39
Publication date2008
Publication statusPublished - 2008
EventNordic Polymer Days 2008 - Stockholm, Sweden
Duration: 11 Jun 200813 Jun 2008


ConferenceNordic Polymer Days 2008


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