Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

S. Nakao; Eugen Stamate; H. Sugai

doi:10.1016/j.tsf.2006.10.050

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

S. Nakao (Invited author)
, Eugen Stamate (Invited author)
, H. Sugai (Invited author)

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

Original language	English
Journal	Thin Solid Films
Volume	515
Issue number	12
Pages (from-to)	4869-4873
ISSN	0040-6090
DOIs	https://doi.org/10.1016/j.tsf.2006.10.050
Publication status	Published - 2007
Event	3rd International Symposium on Dry Process - DPS 2005 - Jeju, Korea, Republic of Duration: 28 Nov 2005 → 30 Nov 2005

Conference

Conference	3rd International Symposium on Dry Process - DPS 2005
Country/Territory	Korea, Republic of
City	Jeju
Period	28/11/2005 → 30/11/2005

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title = "Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2",

abstract = "Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved. ",

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author = "S. Nakao and Eugen Stamate and H. Sugai",

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language = "English",

volume = "515",

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journal = "Thin Solid Films",

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note = "3rd International Symposium on Dry Process - DPS 2005 ; Conference date: 28-11-2005 Through 30-11-2005",

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TY - GEN

T1 - Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

AU - Nakao, S.

AU - Stamate, Eugen

AU - Sugai, H.

PY - 2007

Y1 - 2007

N2 - Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

AB - Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

KW - Energiteknologier på vej

U2 - 10.1016/j.tsf.2006.10.050

DO - 10.1016/j.tsf.2006.10.050

M3 - Conference article

SN - 0040-6090

VL - 515

SP - 4869

EP - 4873

JO - Thin Solid Films

JF - Thin Solid Films

IS - 12

T2 - 3rd International Symposium on Dry Process - DPS 2005

Y2 - 28 November 2005 through 30 November 2005

ER -

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

Abstract

Conference

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