Plasma parameters in the vicinity of the quartz window of a low pressure surface wave plasma produced in O2

S. Nakao, Eugen Stamate, H. Sugai

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 27th International Symposium on Dry Process (DPS)
Number of pages	2
Publication date	2005
Pages	97-98
Publication status	Published - 2005
Externally published	Yes
Event	27th International Symposium on Dry Process (DPS) - Jeju, Korea, Democratic People's Republic of Duration: 1 Jan 2005 → …

Conference	27th International Symposium on Dry Process (DPS)
Country	Korea, Democratic People's Republic of
City	Jeju
Period	01/01/2005 → …

Cite this

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title = "Plasma parameters in the vicinity of the quartz window of a low pressure surface wave plasma produced in O2",

author = "S. Nakao and Eugen Stamate and H. Sugai",

year = "2005",

language = "English",

pages = "97--98",

booktitle = "Proceedings of the 27th International Symposium on Dry Process (DPS)",

note = "27th International Symposium on Dry Process (DPS) ; Conference date: 01-01-2005",

}

TY - ABST

T1 - Plasma parameters in the vicinity of the quartz window of a low pressure surface wave plasma produced in O2

AU - Nakao, S.

AU - Stamate, Eugen

AU - Sugai, H.

PY - 2005

Y1 - 2005

M3 - Conference abstract in proceedings

SP - 97

EP - 98

BT - Proceedings of the 27th International Symposium on Dry Process (DPS)

T2 - 27th International Symposium on Dry Process (DPS)

Y2 - 1 January 2005

ER -