Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

S. Nakao; Eugen Stamate; H. Sugai

doi:10.1016/j.tsf.2006.10.050

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

S. Nakao (Invited author), Eugen Stamate (Invited author), H. Sugai (Invited author)

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

Original language	English
Journal	Thin Solid Films
Volume	515
Issue number	12
Pages (from-to)	4869-4873
ISSN	0040-6090
DOIs	https://doi.org/10.1016/j.tsf.2006.10.050
Publication status	Published - 2007
Event	3rd International Symposium on Dry Process - DPS 2005 - Jeju, Korea, Republic of Duration: 28 Nov 2005 → 30 Nov 2005

Conference

Conference	3rd International Symposium on Dry Process - DPS 2005
Country/Territory	Korea, Republic of
City	Jeju
Period	28/11/2005 → 30/11/2005

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@inproceedings{af7d7a0e71754f4b92bc2b5e94486edf,

title = "Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2",

abstract = "Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved. ",

keywords = "Energiteknologier p{\aa} vej",

author = "S. Nakao and Eugen Stamate and H. Sugai",

year = "2007",

doi = "10.1016/j.tsf.2006.10.050",

language = "English",

volume = "515",

pages = "4869--4873",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "12",

note = "3rd International Symposium on Dry Process - DPS 2005 ; Conference date: 28-11-2005 Through 30-11-2005",

}

TY - GEN

T1 - Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

AU - Nakao, S.

AU - Stamate, Eugen

AU - Sugai, H.

PY - 2007

Y1 - 2007

N2 - Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

AB - Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values. The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.

KW - Energiteknologier på vej

U2 - 10.1016/j.tsf.2006.10.050

DO - 10.1016/j.tsf.2006.10.050

M3 - Conference article

SN - 0040-6090

VL - 515

SP - 4869

EP - 4873

JO - Thin Solid Films

JF - Thin Solid Films

IS - 12

T2 - 3rd International Symposium on Dry Process - DPS 2005

Y2 - 28 November 2005 through 30 November 2005

ER -

Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2

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