Plasma etching on large-area mono-, multi- and quasi-mono crystalline silicon

Rasmus Schmidt Davidsen, Michael Stenbæk Schmidt, Anja Boisen, Ole Hansen

    Research output: Contribution to conferencePosterResearch

    78 Downloads (Pure)
    Original languageEnglish
    Publication date2013
    Number of pages1
    Publication statusPublished - 2013
    Event39th International Conference on Micro and Nano Engineering - London, United Kingdom
    Duration: 16 Sep 201319 Sep 2013
    Conference number: 39th

    Conference

    Conference39th International Conference on Micro and Nano Engineering
    Number39th
    CountryUnited Kingdom
    CityLondon
    Period16/09/201319/09/2013

    Cite this