Plasma etching on large-area mono-, multi- and quasi-mono crystalline silicon

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Original language	English
Publication date	2013
Number of pages	1
Publication status	Published - 2013
Event	39th International Conference on Micro and Nano Engineering - London, United Kingdom Duration: 16 Sep 2013 → 19 Sep 2013 Conference number: 39th

Conference	39th International Conference on Micro and Nano Engineering
Number	39th
Country	United Kingdom
City	London
Period	16/09/2013 → 19/09/2013

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@conference{5f46f782157a4c5aa0f61d27691fcc1a,

title = "Plasma etching on large-area mono-, multi- and quasi-mono crystalline silicon",

author = "Davidsen, {Rasmus Schmidt} and Schmidt, {Michael Stenb{\ae}k} and Anja Boisen and Ole Hansen",

year = "2013",

language = "English",

note = "39th International Conference on Micro and Nano Engineering, mne ; Conference date: 16-09-2013 Through 19-09-2013",

}