Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide

Eugen Stamate, Andrea Crovetto, Simone Sanna

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

267 Downloads (Pure)

Abstract

Plasma parameters during magnetron sputtering of aluminum-doped zinc oxide are investigated with optical emission spectroscopy, electrostatic probes and mass spectrometry with the aim of
understanding the role of negative ions of oxygen during the film growth and improving the uniformity of the film resistivity over the deposition area.
Original languageEnglish
Title of host publicationProceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII)
PublisherEuropean Physical Society
Publication date2016
Pages327-328
Publication statusPublished - 2016
Event 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases - Bratislava, Slovakia
Duration: 12 Jul 201616 Jul 2016
https://www.escampig2016.org/

Conference

Conference 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
CountrySlovakia
CityBratislava
Period12/07/201616/07/2016
Internet address

Cite this

Stamate, E., Crovetto, A., & Sanna, S. (2016). Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide. In Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII) (pp. 327-328). European Physical Society.
Stamate, Eugen ; Crovetto, Andrea ; Sanna, Simone. / Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide. Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII). European Physical Society, 2016. pp. 327-328
@inproceedings{8bd605576d89471ca7b4b5ed862418b7,
title = "Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide",
abstract = "Plasma parameters during magnetron sputtering of aluminum-doped zinc oxide are investigated with optical emission spectroscopy, electrostatic probes and mass spectrometry with the aim ofunderstanding the role of negative ions of oxygen during the film growth and improving the uniformity of the film resistivity over the deposition area.",
author = "Eugen Stamate and Andrea Crovetto and Simone Sanna",
year = "2016",
language = "English",
pages = "327--328",
booktitle = "Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII)",
publisher = "European Physical Society",

}

Stamate, E, Crovetto, A & Sanna, S 2016, Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide. in Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII). European Physical Society, pp. 327-328, 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases, Bratislava, Slovakia, 12/07/2016.

Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide. / Stamate, Eugen; Crovetto, Andrea; Sanna, Simone.

Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII). European Physical Society, 2016. p. 327-328.

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

TY - GEN

T1 - Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide

AU - Stamate, Eugen

AU - Crovetto, Andrea

AU - Sanna, Simone

PY - 2016

Y1 - 2016

N2 - Plasma parameters during magnetron sputtering of aluminum-doped zinc oxide are investigated with optical emission spectroscopy, electrostatic probes and mass spectrometry with the aim ofunderstanding the role of negative ions of oxygen during the film growth and improving the uniformity of the film resistivity over the deposition area.

AB - Plasma parameters during magnetron sputtering of aluminum-doped zinc oxide are investigated with optical emission spectroscopy, electrostatic probes and mass spectrometry with the aim ofunderstanding the role of negative ions of oxygen during the film growth and improving the uniformity of the film resistivity over the deposition area.

M3 - Article in proceedings

SP - 327

EP - 328

BT - Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII)

PB - European Physical Society

ER -

Stamate E, Crovetto A, Sanna S. Plasma diagnostics during magnetron sputtering of aluminum doped zinc oxide. In Proceedings of 23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXIII). European Physical Society. 2016. p. 327-328