| Original language | English |
|---|---|
| Journal | Surface and Coatings Technology |
| Volume | 216 |
| Number of pages | 1 |
| ISSN | 0257-8972 |
| Publication status | Published - 2001 |
| Externally published | Yes |
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Plasma Diagnostics by Detecting the Ion Flux to a Biased Target
- Eugen Stamate
- , K. Ohe
- , O. Takai
- , H. Sugai
- Nagoya Institute of Technology
- Nagoya University
Research output: Contribution to journal › Conference abstract in journal › Research › peer-review