Original language | English |
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Journal | Surface and Coatings Technology |
Volume | 216 |
Number of pages | 1 |
ISSN | 0257-8972 |
Publication status | Published - 2001 |
Externally published | Yes |
Plasma Diagnostics by Detecting the Ion Flux to a Biased Target
Eugen Stamate, K. Ohe, O. Takai, H. Sugai
Research output: Contribution to journal › Conference abstract in journal › Research › peer-review