Plasma Diagnostics by Detecting the Ion Flux to a Biased Target

Eugen Stamate, K. Ohe, O. Takai, H. Sugai

Research output: Contribution to journalConference abstract in journalResearchpeer-review

Original languageEnglish
JournalSurface and Coatings Technology
Volume216
Number of pages1
ISSN0257-8972
Publication statusPublished - 2001
Externally publishedYes

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