Plasma assisted RF sputtering of lithium phosphorous oxynitride thin films for all-solid-state lithium ion batteries

Eugen Stamate, Ane Sælland Christiansen, Peter Holtappels

Research output: Contribution to conferenceConference abstract for conferenceResearchpeer-review

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Original languageEnglish
Publication date2013
Number of pages1
Publication statusPublished - 2013
Event5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials - Nagoya, Japan
Duration: 28 Jan 20131 Feb 2013
Conference number: 5
http://www.isplasma.jp/english/index.html

Conference

Conference5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
Number5
CountryJapan
CityNagoya
Period28/01/201301/02/2013
Internet address

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