Piezoresistive effect in top-down fabricated silicon nanowires

Kasper Reck, Jacob Richter, Ole Hansen, Erik Vilain Thomsen

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    Abstract

    We have designed and fabricated silicon test chips to investigate the piezoresistive properties of both crystalline and polycrystalline nanowires using a top-down approach, in order to comply with conventional fabrication techniques. The test chip consists of 5 silicon nanowires and a reference resistor, each with integrated contacts for electrical 4-point measurements. We show an increase in the piezoresistive effect of 633% compared to bulk silicon. Preliminary temperature measurements indicate a larger temperature dependence of silicon nanowires, compared to bulk silicon. An increase of up to 34% compared to bulk polysilicon is observed in polysilicon nanowires with decreasing dimensions.
    Original languageEnglish
    Title of host publicationIEEE 21st International Conference on Micro Electro Mechanical Systems, 2008. MEMS 2008.
    PublisherIEEE
    Publication date2008
    ISBN (Print)978-1-4244-1792-6
    DOIs
    Publication statusPublished - 2008
    EventIEEE 21st International Conference on Micro Electro Mechanical Systems, 2008. - Tucson, AZ
    Duration: 1 Jan 2008 → …

    Conference

    ConferenceIEEE 21st International Conference on Micro Electro Mechanical Systems, 2008.
    CityTucson, AZ
    Period01/01/2008 → …

    Bibliographical note

    Copyright: 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

    Cite this

    Reck, K., Richter, J., Hansen, O., & Thomsen, E. V. (2008). Piezoresistive effect in top-down fabricated silicon nanowires. In IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE. https://doi.org/10.1109/MEMSYS.2008.4443757