Piezoresistive atomic force microscopy probe with sputtered silicon tip

Peter Rasmussen, Jacob Thaysen, Siebe Bouwstra, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XIV
    Place of PublicationCopenhagen, Denmark
    Publication date2000
    Pages637-640
    Publication statusPublished - 2000

    Cite this

    Rasmussen, P., Thaysen, J., Bouwstra, S., & Boisen, A. (2000). Piezoresistive atomic force microscopy probe with sputtered silicon tip. In Proceedings of Eurosensors XIV (pp. 637-640).