| Original language | English |
|---|---|
| Title of host publication | Proceedings of Nanotechnology III 2005 |
| Publication date | 2005 |
| Publication status | Published - 2005 |
Photolithographic micro-dissection
Maria Holmberg, Winnie Edith Svendsen, N. Tommerup
Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review