Photochemical modification and patterning of SU-8 using Anthraquinone photolinkers

Gabriela Blagoi, Stephan Urs Keller, Karl Fredrik Persson, Anja Boisen, Mogens Havsteen Jakobsen

    Research output: Contribution to journalJournal articleResearchpeer-review


    Bioactive protein patterns and microarrays achieved by selective localization of biomolecules find various applications in biosensors, bio-microelectromechanical systems (bio-MEMS), and in basic protein studies. In this paper we describe simple photochemical methods to fabricate two-dimensional patterns on a Novolac A derivative polymer (SU-8) and, subsequently, their functionalization with biomolecules. Anthraquinone (AQ) derivatives are used to chemically modify and pattern SU-8 surfaces. Features as small as 20 μm are obtained when using uncollimated light. The X−Y spatial resolution of micropatterned AQ molecules is improved to 1.5 μm when a collimated light source is used. This micropatterning process will be important for the functionalization of MEMS-based biosensors. The method saves several processing steps and can be integrated in cleanroom fabrication thus avoiding contamination of the sensor surfaces.
    Original languageEnglish
    Issue number18
    Pages (from-to)9929-9932
    Publication statusPublished - 2008


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